CNS Facilities: Material Synthesis Facility - Center for Nanoscale Systems - Harvard University - Cambridge, MA - Nanotechnology, fabrication and construction of nanoscale systems

CNS Facilities

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Imaging and Analysis

Nanofabrication Facility

Material Synthesis Facility

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Material Synthesis Facility

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Available Tools


Advanced Optical Imaging
CNS ID	Tool Name
HAR-018	Confocal/multiphoton microscope
HAR-028	Leica DM IRB microscope
LZR-001	Multi-Photon/CARS laser system

Back-End and Characterization
CNS ID	Tool Name
SW-1	Automatic Dicing Saw

Deposition Systems
CNS ID	Tool Name
MSF-026	UHV Multi-source Deposition System
MSF-027	NRC Vacuum Evaporator
MSF-028	Edward Coating System E306A
MSF-029	Sharon Vacuum-Dual E-beam Deposition System
MSF-030	Argon-ion sputter deposition system
MSF-031	High temp. oxide Deposition system

Focused Ion Beam Systems (FIB)
CNS ID	Tool Name
FIB-2	Zeiss NVision 40 (B15H)
FIB-3	Zeiss NVision 40 (G07)
HAR-014	DualBeam 235 FIB/SEM

Furnaces
CNS ID	Tool Name
MSF-032	Lindberg Tube Vacuum Furnace w/turbo pump
MSF-033	Lindberg 3-Zone Tube Furnace
MSF-034	Lindberg 3-Zone Tube Furnace
MSF-035	Lindberg 3-Zone Tube Furnace
MSF-036	Jelrus Super-Melt 3 melting furnace
MSF-037	Quad Elliptical Heating Chamber w/Turbo pump
MSF-038	Heavy Duty Muffle Furnace
MSF-039	Heavy Duty Muffle Furnace
MSF-040	Heavy Duty Muffle Furnace
MSF-041	Heavy Duty Furnace
MSF-042	Heavy Duty Furnace
MSF-043	Heavy Duty Furnace

Imaging Sample Prep
CNS ID	Tool Name
HAR-035	CO2 Culture Incubators
HAR-036	Precision Reciprocating Shaker Bath

Materials Preparation
CNS ID	Tool Name
MSF-004	Easco Sparcatron EDM electric discharge machine
MSF-005	Boyar Schults surface grinder
MSF-006	Lepel RF Generator
MSF-007	Swagging system
MSF-008	Hydrogen and oxygen torch/welding station
MSF-009	Drill press and sanding unit
MSF-010	Sandblaster
MSN-G05	G05 Biomaterials Facility

Metrology
CNS ID	Tool Name
MS-1	Zeiss Microscope

Polishing/Chemistry; Optical Microscopy
CNS ID	Tool Name
MSF-014	Bueler Automat 3 Ecomet grinder/polisher
MSF-015	Lapmaster syton polishing unit
MSF-016	Laminar flow hood
MSF-017	Reichert Metallurgical Microscope
MSF-018	Reichert Zetopan Microscope
MSF-019	Olympus Microscope
MSF-020	Shimsdzu Micro Hardness Tester
MSF-021a	Fume hood f/chemical work
MSF-021b	Fume hood f/chemical work
MSF-021c	Fume hood f/chemical work
MSF-021d	Fume hood f/chemical work
MSF-022	Millipore water purifying system
MSF-023	Ultrasonic cleaning stations
MSF-024	Thermal couple station
MSF-025	Mettler balance

Scanning Probe Microscopy
CNS ID	Tool Name
SPM-1	Asylum-1 MFP-3D AFM System
SPM-2	Asylum-2 MFP-3D Coax AFM
SPM-3	AFM/STM Imaging: Omicron VT-25
SPM-4	WITec Confocal Raman Microscope

Surface Analysis
CNS ID	Tool Name
HAR-007	XPS ESCA SSX-100

Surface Characterization; Magnetic Properties
CNS ID	Tool Name
MSF-013	Gaertner Ellipsometer w/IBM computer

Thermal Analysis
CNS ID	Tool Name
MSF-011	Perkin Elmer Differential Scanning Calorimeter
MSF-012	Perkin Elmer Pyris-Diamond TG/DTA

X-Ray Diffraction and Scattering
CNS ID	Tool Name
MSF-001	Spellman 1-kilowatt x-ray generator
MSF-002	Diano X-Ray Generator
XRA-001	Bruker X-Ray Diffractometer
XRA-002	Micro-CT System

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