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Material Synthesis Facility
 KLA-Tencor P-16+ Contact Stylus Profiler
CNS ID: PL-4
Make: KLA-Tencor
Model: P-16+
Category: Chemical Nanotechnology
Name: KLA-Tencor P-16+ Contact Stylus Profiler
Location: LISE - G06
 
 
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More Info: 
The KLA-Tencor P-16+ is a contact stylus-type surface profiler, which is capable of being utilized in a wide range of applications. It delivers automated step height, surface contour, waviness and roughness measurements with detailed 2D or 3D analysis of topography for a variety of surfaces and materials, including soft materials like polydimethylsiloxane (PDMS). It uses a diamond stylus for advanced profiling applications on a Windows XP operating system. It has a Microhead with an extended vertical range of 1 mm, stylus force as low as 0.5 mg, and extended scan length of 200mm. P-16+ offers top and side view optics, allowing the operator to automatically switch between a top-down view for fast stylus positioning and navigating over the sample, and an angled view for easy monitoring of the stylus as it scans over target features.
Comments: 
 
Contact Info:
Hao-Yu (Greg) Lin
LISE G40
11 Oxford Street
Cambridge, MA 02138
617-384-5028
hlincns.fas.harvard.edu
Jason Tresback
LISE G46
11 Oxford Street
Cambridge, MA 02138
617-496-1783
jtresbackcns.fas.harvard.edu
 
 

05/06/13
New Computational Cluster On-Line
 

05/02/13
LED Measurement System and Integrating Sphere now available! Contact Jason Tresback for training.
 

03/12/13
Quantox non-contact electrical measurement tool commissioned. See Philippe for training.
 

02/20/13
Olympus Total Internal Reflection Fluorescence Microscopy Hands-On Demo
 

DRIE system on site - available soon.
 

01/18/13
i-line stepper coming to CNS this spring!
 

08/14/12
We bought the k-alpha XPS - it will be staying!
 

05/14/12
We bought the Heidelberg uPG501 direct write system - it will be staying!
 

10/04/12
XeF2 etch system now available!
 

02/21/12
Time Resolved PL Spectroscopy now available
 
 
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