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Special CNS Seminar: Three Cyclic Plasma Processes: ALE, DRIE, & ALD
Marco Volleth, Sentech Instruments GmbH
March 15, 2024 | 12pm – 1pm | LISE 303
Abstract: For some time now, plasma processes have not only been carried out
continuously, but also used in a cyclical manner. The best-known process of this type is the
so-called Bosch process for deep etching of silicon (DRIE). There is also atomic layer
deposition (ALD) for depositing very thin layers with high precision and conformality. The
equivalent etching process, called atomic layer etching (ALE), is used in more and more
applications. In the lecture, these three cyclic plasma processes will be examined in more
detail and applications will be shown using examples from SENTECH customers and our
application lab.
About Speaker: Marco Volleth studied nanotechnology with a bachelor's degree at the
Friedrich-Alexander University of Erlangen from 2013 until 2017, followed by a master's
degree in Electrical and Microsystems Engineering at the University of Applied Sciences in
Regensburg (both Germany). The main focus of his studies was in the areas of lithography
and reactive ion etching, especially for the two-material systems silicon and gallium nitride.
Since October 2020 he is working as an Application Engineer for plasma etching at
SENTECH Instruments in Berlin, Germany. SENTECH is a manufacturer of plasma process
systems and devices for thin-film metrology.
CNS Seminar: Cathodophores for Multicolor Electron Microscopy
Prof. Max Prigozhin , Harvard University
March 7, 2024 | 12pm – 1pm | Maxwell-Dworkin 119
Abstract: Optical and electron microscopy are indispensable tools for nanoscale imaging of proteins and cell membranes. In principle, it should be possible to use the electron beam both for ultrastructural imaging using electron scattering and for protein localization by directly exciting suitable protein tags and detecting their luminescence – a process termed cathodoluminescence (CL). I will discuss our efforts on developing new imaging strategies to achieve reliable multicolor detection of single ~10 nm cathodoluminescent lanthanide nanocrystals (cathodophores). These nanocrystals are promising candidates for protein labeling in multicolor electron microscopy. In the future, cathodophores can be used to understand the fascinating cell biology of membrane-associated protein structures that drive many cellular processes.
About Speaker: Max Prigozhin is an Assistant Professor of Molecular and Cellular Biology and of Applied Physics, Harvard University. His lab is involved in collaborative and interdisciplinary work in single-cell and single-molecule biophysics of transmembrane signaling. They are particularly interested in cryo-vitrification, all kinds of electron and optical microscopy, and G-protein-coupled receptors. They are developing new biophysical methods to investigate the nanoscale cellular organization of G protein-coupled receptor (GPCR) and neural signaling. The two technical directions that they are currently working on are Multicolor electron microscopy and Time-resolved cryo-vitrification.
[+MORE]Recent Publications
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A new metamaterial for MRI-safe deep brain stimulation leads
10.1109/ICEAA57318.2023.10297949
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Scanning multiprobe microscopy for mesoscopic devices and materials: Part II
Bulletin of the American Physical Society, 2024
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Scanning multiprobe microscopy for mesoscopic devices and materials: Part I
Bulletin of the American Physical Society, 2024
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Reconfigurable photonic integrated circuits based on liquid-crystal-cladded slab waveguides
https://spie.org/photonics-west/presentation/Reconfigurable-photonic-integrated-circuits-based-on-liquid-crystal-cladded-slab/12890-52
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Observation of Electronic Viscous Dissipation in Graphene Magneto-thermal Transport
APS March Meeting 2024, Abstract: M07.00008
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Ecological and phylogenetic signals in catarrhine root morphology
Conference presentation, American Association of Biological Anthropologists
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Time-stepped optical frequency comb laser design leveraging three-dimensional integration of thin-film lithium niobate and silicon CMOS
https://spie.org/photonics-west/presentation/Time-stepped-optical-frequency-comb-laser-design-leveraging-three-dimensional/12890-34
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Compact and wideband nanoacoustic pass-band filters for future 5G and 6G cellular radios
Giribaldi, G., Colombo, L., Simeoni, P. et al. Compact and wideband nanoacoustic pass-band filters for future 5G and 6G cellular radios. Nat Commun 15, 304 (2024). https://doi.org/10.1038/s41467-023-44038-9
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Staphylococcus aureus AbcA transporter enhances persister formation under β-lactam exposure
Truong-Bolduc et al., “Staphylococcus Aureus AbcA Transporter Enhances Persister Formation under β-Lactam Exposure.”
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Fractional quantum anomalous Hall effect in multilayer graphene
Lu, Z., Han, T., Yao, Y. et al. Fractional quantum anomalous Hall effect in multilayer graphene. Nature 626, 759–764 (2024). https://doi.org/10.1038/s41586-023-07010-7
EXECUTIVE DIRECTOR
Directors Welcome
The Center for Nanoscale Systems (CNS) at Harvard University was created with a very clear vision: To provide a collaborative multi-disciplinary research environment to support of the creation and evolution of world-class nanoscience and technical expertise, for the Harvard research community as well as the larger community of external researchers both from academia and industry.
Our Core Values:
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